1968/12/27

Micro-Nano Mechatronics

MEMS and NEMS, 3D fabrication techniques, Sensors

http://www.toyota-ti.ac.jp/mems/index.htm

Nagoya University

Toyota Technologcical Institute, Professor (2007.4-present)
Tohoku University, Associate Professor (2001.11-2007.3)
Tohoku University, Lecturer (2000.7-2001.10)
Tohoku University, Assistant Professor (1996.1-2000.6)
PD Research Fellow with the Japan Society for the Promotion of Science(1995.4-1995.12）

* General Chair of IEEE International Conference on Optical MEMS and Nanophotonics (2013.8.19-22, Kanazawa, Japan) in schedule.
* Program Committee of the 4th International Conference on PLAsma-Nano Technology & Science (2011.3.10-12).
* Organizing Committee, Program Committee of 3rd International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials (2011-)
* International Organizing Committee of 7th International Conference on Reactive Plasmas (2010.10.4-8, Maison de la Chimie, Paris, France).
* Technical Program Chair of IEEE/LEOS International Conference on Optical MEMS (2010.8.9-12, Sapporo, Japan).
* Program Committee of International Symposium on Advanced Plasma Science and its Applications (2010-)
* Steering Committee of IEEE/LEOS International Conference on Optical MEMS, 2007-2012.
* Program Committee of Solid State Devices and Materials, Area: Micro-Nano Electromechanical/Bio Conjugated Systems, 2007-2012.
* Guest Editor of Journal of Optics A: Pure and Applied Optics, Vol. 10, Number 4, 2008, Selected papers from Optical MEMS and Nanophotonics 2007.

The Japan Society of Mechanical Engineers, Tokai Branch "High-Tech Ivent for Elementary or Junior High School Students" (attended 2011.8.2)