Small valuable devices : Micro-/nano-machines and related technology

Mechatronics is the field combining the mechanics with the electronics. When the size decreases, shapes, processes, and materials give the important meanings combining with the mechanics and the electronics. We are making every effort for realizing new sensors, actuators, and micro-/nano-devices including three-dimensional functional surface.

Photolithography on three-dimensional samples
Atomospheric microplasma and MEMS
Resonator-type sensors,wearable sensors
Optical MEMS devices

http://www.toyota-ti.ac.jp/mems/index.htm