Research
僼僅僩儕僜僌儔僼傿傪棙梡偟偨嬊強僾儔僘儅俁俢僾儕儞僥傿儞僌偵傛傞崅惛搙崅懴媣惈僾儗僗僷儞僠偺憂惢
乮岞嵿乯戝郪壢妛媄弍 怳嫽嵿抍2020擭搙尋媶彆惉乽堦斒尋媶奐敪乿
嫟摨尋媶幰丗憡郪棿旻丂昞柺婡擻僨僓僀儞尋媶強
嶰師尦僼僅僩儕僜僌儔僼傿壛岺媄弍偺奐敪
椷榓2-3擭搙
嶰師尦僼僅僩儕僜僌儔僼傿偵傛傞嬥宆偺儘乕僞僗壛岺偲僄傾僐儞擬岎姺婍僼傿儞偺杊憵婡擻
2019.4.1乣2021.3.31
彫悈椡敪揹傓偗僒儊敡儕僽儗僢僩旝嵶峔憿晅偒掞峈掅尭僷僀僾偺壛岺媄弍
2019.4.1乣2020.3.31
旝嵶峔憿宍惉偵娭偡傞尋媶
2018.5乣2020.3
嬥宆嬋柺偺僼僅僩儕僜僌儔僼傿旝嵶壛岺
2018.4乣2019.3
埑墑儘乕儖柺傊偺昞柺怓挷嬒堦壔僷僞乕儞偺僼僅僩儕僜僌儔僼傿旝嵶壛岺
揤揷嵿抍 暯惉29擭搙慜婜彆惉 AF-2017024 堦斒 尋媶奐敪彆惉
2017.10乣2020.3
乬Patterning
Vertical Sidewall Using Standard Aligner乭 Presented at MEMS 2018 at Belfast, UK
丂
丂
4mm pitch, realized by maskless exposure machine
JST CREST 惗懱挻暘巕墖梡僼儘儞僥傿傾僾儘僙僗偵傛傞崅婡擻壔僫僲僔僗僥儉
暥晹壢妛徣 壢妛尋媶旓曗彆嬥 怴妛弍椞堟尋媶 僾儔僘儅偲僫僲奅柺偺憡屳嶌梡偵娭偡傞妛弍婎斦偺憂惉
僥乕儅俁丂惗妶廗姷昦摍偵娭學偡傞惗懱忣曬傪柍怤廝丒掅怤廝偱擔忢揑偵儌僯僞儕儞僌偱偒傞僙儞僒偲僨僶僀僗偺奐敪
朙廐彠妛夛Toyoaki Scholarship Foundation
Tokai Region
Knowledge Cluster Initiative
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revision: 24 December 2018 |