World of micro-machines and micro-texturing
Mechatronics is the region combining the mechanics and the
electronics.
In the micro/nano-devices prepared using the microfabrication, the
both factors become important for realizing the functions.
This region is progressing in a quick speed at now.
Our interests are realizing new functions taking the stand point
utilizing the micromachining techniques and microdevices.
Present efforts are focusing on the following regions.
1.
Micromachining especially for realizing 3D
structures
2.
Micro-plasma (processing and devices)
3.
Micro-devices especially for optical and IR
applications
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revision: 2 April 2022 |